TMS-100 Hardware | Standard version | With XY positioning stage |
Dimensions [L x W x H] | 580 mm x 340 mm x 372 mm |
Weight | ~27 kg | ~30 kg |
Power | 100...240 VAC ±10%, 50/60 Hz; max. 40 W | max. 100 W |
Operating/storage temperature | +5 °C ... +35 °C (41 °F...95 °F) / -10 °C ... +65 °C (14 °F...149 °F) |
Relative humidity | max. 80%, non-condensing |
Lamp systems | IEC/EN 62471:2009-03 |
Electrical safety | IEC/EN 61010-1: 2002-08; EMC: IEC/EN 61326: 2006-10 |
Scope of delivery | Interferometer, industrial PC with TFT monitor, connection cable, 1 reference filter,TMS software with hardlock (dongle) |
Optional accessories | More reference filters, λ/20 plate, calibration kit |
Optics | |
Measurement method | Scanning white-light interferometry (Michelson) | |
Imaging system | Telecentric; light source: white-light LED | |
Vertical dynamic range | 70 mm | |
Version | Pixel resolution | Max. field of view | |
Standard version | With XY positioning stage | |
With camera scA 640 | 58 µm | 38 mm x 28 mm | 88 mm x 78 mm | |
With camera scA 1000 | 36 µm | 37 mm x 28 mm | 87 mm x 78 mm | |
Performance Specifications
Z-performance parameters1) |
Evaluation procedure | Smooth surfaces 2) | Rough surfaces 3) |
Resolution, average of 50 (rms) | 250 pm | 3 nm |
Resolution, single meas. (rms) | 1 nm | 25 nm |
Representative flatness measurement results 4) |
Evaluation procedure | Smooth surfaces 2) | Rough surfaces 3) |
Average flatness deviation | 100 nm | 375 nm |
Repeatability of a flatness
measurement | 20 nm | 50 nm |
1) Empirically measured, typical specification parameters for the Z-performance of the TMS-100. Measuring on a flat mirror (95 % of the maximum measuring field, interference contrast ≈ 1).
2) Evaluation of the correlogram phase.
3) Evaluation of the correlogram envelope.
4) Rounded values derived by empirical measurement data and a statistical evaluation of the measured flatness for several TMS-100 at different sample increments and for both correlogram evaluation procedures. Measurements on a plane mirror (95 % of the maximum field of view used, interference contrast ≈ 1).
Representative step height measurements 1) |
Nominal groove depth | µm | 5 | 50 | 450 | 1000 | 2000 | 5000 |
Repeatability 2) (Standard deviation) | µm | 0.39 | 0.30 | 0.24 | 0.28 | 0.21 | 0.22 |
Relative repeatability | % | 7.8 | 0.6 | 0.05 | 0.03 | 0.01 | 0.004 |
Expanded measurement uncertainty 3) | µm | 0.5 | 3.75 | 7.5 | 7.5 | 7.5 | 7.5 |
Relative expanded measurement uncertainty | % | 10 | 7.5 | 1.67 | 0.75 | 0.38 | 0.15 |
1) Empirically determined representative performance for measurements on a calibrated PTB depth setting standard type A1 (ISO 5436-1).
2) Variation of the measurement values for a series of measurements under repeatability conditions, averaged for several measurement devices.
3) Margin of the confidence interval with a probability of 99.7 % (3σ), determined by the standard deviation from the calibrated value of a single step (several devices under reproducibility conditions).
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